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MEMS

Microelectromechanical systems (MEMS) represent integrated devices created through combining the mechanical elements, sensors and electronics on a single silicon base using micromanufacturing technologies.

Processing methods enable the assembly of complex, multifunctional and reliable systems with low power consumption and low cost on a small semiconductor chip.

The size of micromechanical elements in MEMS is from 1 to 100 micron.

On the basis of MEMS-sensors GS Nanotech designs and assembles inertial measuring modules (IMM). IMMs determine the position of an object and its direction of movement; they are used in the production sector, aviation, navigation and robotics systems.

This development offers unique software solutions and data processing algorithms, and guarantees the following:
  • effective elimination of errors and increased fault tolerance of the navigation module;
  • reliable and accurate determination of object movement characteristics: random noise from measurements can be substantially reduced due to the fact that several blocks of inertial measuring devices instead of one are involved in the process.